Would you like to see an etching? 7mm fov at 1x, 10 micron resolution laterally, and 5 picometers in z.
Conversation
“They aligned the masks under the microscope not the inspection scope, right? They cleaned off all the resist between layers, right?”
1
Replying to
The little stars are the test patterns for a silicon wafer dry-etched by electrons:
rdworldonline.com/electrons-not-
They should be the only things visible with the ellipsometer, but the wet-processing guys (not PVA TePla) screwed up.
2

