MKS makes these diaphragm gauges using inconel that are good for high temp corrosives. https://www.mksinst.com/c/capacitance-manometers … Edwards makes a corrosion resistant version of their pirani gauge (confirm XLC suffix in part number). Not sure what material they use. https://shop.edwardsvacuum.com/products/d02604000/view.aspx …
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The real concern is to be able to heat the gauge to be sure that the material to be measured doesn't condense on the gauge assembly. I'll get my colleagues to have a look and a think. Thank you.
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With the help of teflon/quartz/steel - sounds like a question for a fluorine chemist?
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Requirements are pretty brutal.
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Čini se da učitavanje traje već neko vrijeme.
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